Wide-bandgap semiconductors
Wide-bandgap semiconductors, such as SiC and Group-III
nitrides, are advanced materials widely used in high-power, high-frequency,
high-temperature electronics and optoelectronics. The progress in
the wide-bandgap semiconductor technology is hindered by the lack of homoepitaxial
substrates suitable for the epitaxy of multi-layered high-quality device structures. Further
reduction in the dislocation density and complete elimination of micropipes is strongly
desirable for SiC wafers. Conventional methods of bulk crystal growth, like Czochralski growth from the melt, are inapplicable for the fabrication of the wide-bandgap materials. So an alternative, sublimation (Physical Vapor Transport) technique, is world-wide spread for growing these semiconductors.
STR Activity in the Market of Wide Bandgap Semiconductors
In our everyday work, we develop and apply for the industrial
facilities the advanced models of SiC, AlN and GaN bulk crystal growth by PVT with the focus
on specific features of the growth technique. Comprehensive analysis is performed in a wide range of the problems arising
in long-term growth,
from evaluation of the growth system design to prediction of the crystal quality.
Use of Numerical Modeling
To get a better insight into the growth process, as well as to optimize the growth system design and operating conditions,
numerical modeling is extensively used.
The larger is the size of a crystal of a required quality, the more stringent
are requirements on the choice and control of the operating conditions.
Additionally, the cost of
an individual growth run rises significantly with the crystal size. All this makes growth
modeling an important tool applicable to every stage of the technology, from the growth system
design to the optimization of the growth conditions, including the materials utilization
efficiency and other economical factors.